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Vacuum Transport Robot - List of Manufacturers, Suppliers, Companies and Products

Vacuum Transport Robot Product List

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3-Axis Cylindrical Coordinate Vacuum-Compatible Clean Robot LVHR3000 Series

3-Axis Cylindrical Coordinate Vacuum-Compatible Clean Robot LVHR3000 Series

The S-shaped acceleration and deceleration control enables high-speed and high-precision transport of glass substrates.

The LVHR3000 series vacuum-compatible clean robot with a 3-axis cylindrical coordinate system, designed for glass substrates, is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. It transports glass substrates at high speed and high precision through S-curve acceleration and deceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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Vacuum conveying robot

Vacuum conveying robot

It is a clean and highly reliable vacuum transport robot and transport platform. 【ULVAC】

This is a clean and highly reliable vacuum transport robot and transport platform that incorporates the technology developed by ULVAC, a manufacturer of vacuum equipment. We offer a wide range of products compatible with various vacuum equipment. 【Product Lineup】 ○ High vacuum compatible robot ELEC-RZ (for φ200mm/300mm wafers) ○ High vacuum compatible robot COVOT (for φ200mm/300mm wafers) ○ High vacuum compatible robot COVOT-LC (for φ200mm/300mm wafers) ○ Medium vacuum compatible independent four-arm robot COVOT-6 (for φ300mm wafers) ○ Vacuum transport platform NCH series (for φ200mm/300mm wafers) For more details, please contact us or download the catalog.

  • Transport and handling robots

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